JPS6249562B2 - - Google Patents

Info

Publication number
JPS6249562B2
JPS6249562B2 JP51077190A JP7719076A JPS6249562B2 JP S6249562 B2 JPS6249562 B2 JP S6249562B2 JP 51077190 A JP51077190 A JP 51077190A JP 7719076 A JP7719076 A JP 7719076A JP S6249562 B2 JPS6249562 B2 JP S6249562B2
Authority
JP
Japan
Prior art keywords
light
test film
optical system
signal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51077190A
Other languages
English (en)
Japanese (ja)
Other versions
JPS533363A (en
Inventor
Minokichi Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7719076A priority Critical patent/JPS533363A/ja
Publication of JPS533363A publication Critical patent/JPS533363A/ja
Publication of JPS6249562B2 publication Critical patent/JPS6249562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP7719076A 1976-06-30 1976-06-30 Measurement method and measurement device Granted JPS533363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7719076A JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7719076A JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Publications (2)

Publication Number Publication Date
JPS533363A JPS533363A (en) 1978-01-13
JPS6249562B2 true JPS6249562B2 (en]) 1987-10-20

Family

ID=13626886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7719076A Granted JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Country Status (1)

Country Link
JP (1) JPS533363A (en])

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE84221T1 (de) * 1981-12-02 1986-08-14 Advanced Semiconductor Products, Santa Cruz, Calif. Duenne optische membranen, sowie methode und vorrichtung zu ihrer herstellung sowie messung von dicke und brechungsindex.
JPS60127403A (ja) * 1983-12-13 1985-07-08 Anritsu Corp 厚み測定装置
JPS6211106A (ja) * 1985-03-01 1987-01-20 Agency Of Ind Science & Technol 干渉法膜厚測定装置
JPS61294338A (ja) * 1985-06-21 1986-12-25 Agency Of Ind Science & Technol 干渉法膜屈折率測定装置
JP2510418B2 (ja) * 1986-09-26 1996-06-26 工業技術院長 ビ−ム走査型干渉法膜厚測定装置
JPS6453101A (en) * 1987-05-25 1989-03-01 Kurashiki Boseki Kk Equal tilt angle interference type film thickness gauge
JPH0810190B2 (ja) * 1987-08-08 1996-01-31 三菱化学株式会社 薄膜の電気光学効果の測定方法
DE3890776T1 (de) * 1987-09-18 1989-08-17 Ricoh Kk Verfahren und einrichtung zum messen von brechungsindex und dicke einer duennschicht
JPS6475903A (en) * 1987-09-18 1989-03-22 Ricoh Kk Method for measuring refractive index and film thickness
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
JPH062122U (ja) * 1992-06-15 1994-01-14 横河電機株式会社 横ずらし干渉計
DE19520094A1 (de) * 1995-06-01 1996-12-05 Bayer Ag Vorrichtung zur Messung der optischen Transmission und Dicke transparenter Materialien
JP3631856B2 (ja) * 1996-07-26 2005-03-23 大日本印刷株式会社 透明膜の検査方法
JP2013148509A (ja) * 2012-01-20 2013-08-01 Canon Inc 画像処理装置及び画像処理方法
CN109632711B (zh) * 2019-01-10 2021-10-01 山东拓步教育科技有限公司 一种ps小球层数检测装置
JP2021060342A (ja) * 2019-10-09 2021-04-15 パイオニア株式会社 検出装置

Also Published As

Publication number Publication date
JPS533363A (en) 1978-01-13

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